product

Hot-Temperature-Spin-On-Carbon-Hardmask

YHS-80, YHS-140, YHS-330, YHS-330A is Spin on Hot-temperature carbon Hardmask.

새 캔버스Characteristics
  · High Tg
  · High etch resistant
  · High C content (more than 85wt%)
  · Low defect density

새 캔버스Process Conditions
  · Increased photo processing characteristics
  · Increased etch processing characteristics
  · Increased process compatibility
  · Reduced cost resulting from the use of spin coating